专利名称：METHOD AND APPARATUS FOR
INSPECTING SCRIBES IN SOLAR MODULES
发明人：Asaf Schlezinger申请号：US12492989申请日：20090626
公开号：US20100330711A1公开日：20101230
专利附图：
摘要：Embodiments of the present invention generally relate to a method andapparatus for inspecting and analyzing the spacing of isolation trenches scribed in a solarmodule during the fabrication process. In one embodiment, images of the scribed
trenches are captured and analyzed at various points in the fabrication process. Theresults may then be used either manually or in an automated fashion to diagnose, alter,and tune upstream processes for improved scribe spacing on subsequently processedsolar modules.
申请人：Asaf Schlezinger
地址：Sunnyvale CA US
国籍：US
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