INTEGRATED CIRCUIT WITH SENSOR AND METHOD OF MANUF

专利名称：INTEGRATED CIRCUIT WITH SENSOR AND

METHOD OF MANUFACTURING SUCH ANINTEGRATED CIRCUIT

发明人：Roel DAAMEN,Robertus Adrianus Maria

WOLTERS,Rene Theodora HubertusRONGEN,Youri Victorovitch PONOMAREV

申请号：US15069898申请日：20160314

公开号：US20160197047A1公开日：20160707

专利附图：

摘要：Disclosed is an integrated circuit comprising a substrate carrying a plurality ofcircuit elements; a metallization stack interconnecting said circuit elements, saidmetallization stack comprising a patterned upper metallization layer comprising a firstmetal portion; a passivation stack covering the metallization stack; and a sensor includinga sensing material on the passivation stack, said sensor being coupled to the first metalportion by a via extending through the passivation stack. A method of manufacturing suchan IC is also disclosed.

申请人：ams International AG

地址：Rapperswil-Jona CH

国籍：CH

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