专利名称:MECHANICAL RESONATING STRUCTURES
INCLUDING A TEMPERATURECOMPENSATION STRUCTURE
发明人:KUYPERS, JAN, H.,CHEN, DAVID,
M.,GAIDARZHY, ALEXEI,ZOLFAGHARKHANI,GUITI
申请号:EP09836502申请日:20091216公开号:EP2377176A4公开日:20120822
摘要:Mechanical resonating structures are described, as well as related devices andmethods. The mechanical resonating structures may have a compensating structure forcompensating temperature variations.
申请人:SAND 9, INC.
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